Invention Application
- Patent Title: AXISYMMETRIC HEATING ASSEMBLY LAYOUT WITH DOUBLE ENDED LAMP
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Application No.: US17725010Application Date: 2022-04-20
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Publication No.: US20220397706A1Publication Date: 2022-12-15
- Inventor: Shu-Kwan LAU , Enle CHOO , Danny Don WANG , Shainish NELLIKKA , Toshiyuki NAKAGAWA , Zhiyuan YE , Abhishek DUBE
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Priority: IN202141025609 20210609
- Main IPC: G02B5/09
- IPC: G02B5/09 ; H05B3/00

Abstract:
Apparatus for heating a substrate within a substrate processing chamber are described herein. More specifically, possible lamp modules for use within a substrate processing chamber are described. The lamp modules include a reflector body. The reflector body is a reflective material. The reflector body includes grooves disposed in a surface and configured to direct radiant energy towards a substrate. Each ring includes multiple grooves with different cross sections to allow radiant energy to be directed at different radial positions on the substrate from the same ring. The grooves may be either curved or linear grooves.
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