Invention Application
- Patent Title: ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD
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Application No.: US17784857Application Date: 2020-12-04
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Publication No.: US20230005667A1Publication Date: 2023-01-05
- Inventor: Kazuhiro YOSHIKAWA , Kenichi YOSHIDA , Takashi OHTSUKA
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2019-229654 20191219
- International Application: PCT/JP2020/045209 WO 20201204
- Main IPC: H01G4/224
- IPC: H01G4/224 ; H01G4/40 ; H01G4/30 ; H01G4/08

Abstract:
An electronic component includes: a conductive pattern provided on the main surface of a substrate and constituting a lower electrode; a dielectric film that covers top and side surfaces of the conductive pattern; and a conductive pattern stacked on the top surface of the conductive pattern through the dielectric film and constituting an upper electrode. A part of the dielectric film that is parallel to the main surface of the substrate is removed at least partly. Partially removing a part of the dielectric film that is parallel to the main surface of the substrate allows stress relaxation. This prevents peeling at the interface between the lower electrode and the dielectric film.
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