Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
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Application No.: US17941605Application Date: 2022-09-09
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Publication No.: US20230005938A1Publication Date: 2023-01-05
- Inventor: Keisuke NAKATSUKA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11578 ; G11C5/06

Abstract:
A semiconductor memory device according to an embodiment includes first to ninth conductive layers, first and second insulating members, and first to fourth pillars. A distance between the first and second pillars in a cross section including the second conductive layer and the sixth conductive layer is smaller than a distance between the first and second pillars in a cross section including the third conductive layer and the seventh conductive layer. A distance between the third and fourth pillars in a cross section including the fourth conductive layer and the eighth conductive layer is greater than a distance between the third and fourth pillars in a cross section including the fifth conductive layer and the ninth conductive layer.
Information query
IPC分类: