Invention Publication
- Patent Title: IMAGE SENSOR
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Application No.: US17887887Application Date: 2022-08-15
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Publication No.: US20230146645A1Publication Date: 2023-05-11
- Inventor: Hyuk Soon CHOI , Sang-Su PARK , Hee Sung SHIM , Dae Kun AHN , Min-Jun CHOI
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210151360 2021.11.05
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor is provided. The image sensor includes a substrate including a plurality of unit pixels, each of unit pixels includes a photoelectric conversion element; a first trench formed in the substrate in a lattice shape to isolate the plurality of unit pixels; a plurality of first capacitor structures extended along a sidewall of the first trench in the first trench, including a first electrode, a second electrode, and a first dielectric layer between the first electrode and the second electrode; and a first capacitor isolation pattern at a lattice point of the first trench to isolate the plurality of first capacitor structures.
Information query
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