Invention Publication
- Patent Title: Semi-Floating Gate Memory Device and Method for Fabricating the Same
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Application No.: US17953855Application Date: 2022-09-27
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Publication No.: US20230146733A1Publication Date: 2023-05-11
- Inventor: Heng Liu , Zhigang Yang , Jianghua Leng , Tianpeng Guan
- Applicant: Shanghai Huali Integrated Circuit Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huali Integrated Circuit Corporation
- Current Assignee: Shanghai Huali Integrated Circuit Corporation
- Current Assignee Address: CN Shanghai
- Priority: CN 2111319362.3 2021.11.09
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/423 ; H01L21/28 ; H01L29/66

Abstract:
The present application discloses a semi-floating gate memory device, which is a double control gate semi-floating gate memory device with a high-K/metal gate and a silicon oxide/polysilicon gate. A control gate epitaxial silicon layer, a source region and a drain region are formed by an epitaxial growth structure, separate source and drain ion implantation is not needed, the mask required for source and drain ion implantation is saved, and the fabrication cost is low. The present application further discloses a method for fabricating the semi-floating gate memory device.
Public/Granted literature
- US12040413B2 Semi-floating gate memory device and method for fabricating the same Public/Granted day:2024-07-16
Information query
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