Invention Publication
- Patent Title: Organic Vapor Jet Printing System
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Application No.: US18099339Application Date: 2023-01-20
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Publication No.: US20230151491A1Publication Date: 2023-05-18
- Inventor: Gregory MCGRAW , William E. QUINN , Gregg KOTTAS , Siddharth HARIKRISHNA MOHAN , Matthew KING
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- The original application number of the division: US15290101 2016.10.11
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C14/12 ; C23C14/24 ; B41J2/00 ; H10K71/13

Abstract:
Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
Public/Granted literature
- US11976360B2 Organic vapor jet printing system Public/Granted day:2024-05-07
Information query
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