公开(公告)号：US20240247375A1

公开(公告)日：2024-07-25

申请号：US18625401

申请日：2024-04-03

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  H10K71/13

CPC classification number: C23C16/45563 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20210351385A1

公开(公告)日：2021-11-11

申请号：US17224240

申请日：2021-04-07

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  H01L51/00 ,  B41J2/14

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20190232325A1

公开(公告)日：2019-08-01

申请号：US16254998

申请日：2019-01-23

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING

IPC: B05C5/02 ,  G03F7/00

CPC classification number: B05C5/027 ,  B05C5/0212 ,  G03F7/0015 ,  H01L51/0002 ,  H01L51/5004 ,  H01L2251/552

Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

公开(公告)号：US20170162835A1

公开(公告)日：2017-06-08

申请号：US15441331

申请日：2017-02-24

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory McGRAW ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING ,  Elliot H. HARTFORD, Jr.

IPC: H01L51/56 ,  C23C14/12 ,  C23C14/22 ,  B05B15/02

CPC classification number: H01L51/56 ,  B05B12/18 ,  B05B15/555 ,  B41J2/1433 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14475 ,  C23C14/12 ,  C23C14/22 ,  C23C14/228 ,  C23C14/24 ,  H01L51/0004 ,  H01L51/0005 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.

公开(公告)号：US20150380648A1

公开(公告)日：2015-12-31

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth Harikrishna MOHAN ,  Benjamin SWEDLOVE ,  Gregg KOTTAS

IPC: H01L51/00 ,  H01L51/56 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54

CPC classification number: C23C14/12 ,  B05D1/60 ,  B41J2/045 ,  B41J2202/02 ,  C23C14/04 ,  C23C14/228 ,  C23C14/54 ,  H01L51/0005 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

Abstract translation: 所公开的主题的实施例提供了方法和系统，包括喷嘴，要沉积在与喷嘴流体连通的基板上的材料源，与待喷射的材料沉积的材料源流体连通的输送气体源， 与喷嘴相邻设置的排气通道，与喷嘴和排气通道流体连通并且邻近排气通道设置的限制气体源，以及致动器，用于调节喷嘴的沉积喷嘴孔和 沉积目标。 飞高高度分离的调整可能会停止和/或开始从喷嘴沉积材料。

公开(公告)号：US20230151491A1

公开(公告)日：2023-05-18

申请号：US18099339

申请日：2023-01-20

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  C23C14/12 ,  C23C14/24 ,  B41J2/00 ,  H10K71/13

CPC classification number: C23C16/45563 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  B41J2/00 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20220352467A1

公开(公告)日：2022-11-03

申请号：US17729465

申请日：2022-04-26

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony OUTTEN ,  Gregory MCGRAW ,  Matthew KING ,  Xin XU

IPC: H01L51/00 ,  C23C14/12 ,  C23C14/22 ,  C23C16/44

Abstract: Organic vapor jet printing (OVJP) devices and techniques are provided that use a solid materials sublimation source to provide material for deposition on a substrate. Carrier gas from a carrier gas source entrains vapor from the solid material within each sublimation source for transport to a print head within a deposition chamber. The sublimation source includes a sufficiently long internal flow path to achieve an acceptable level of material saturation of the carrier gas.

公开(公告)号：US20220020972A1

公开(公告)日：2022-01-20

申请号：US17361469

申请日：2021-06-29

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Igor KOZIN ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  B05B12/12 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.

公开(公告)号：US20200291521A1

公开(公告)日：2020-09-17

申请号：US16891148

申请日：2020-06-03

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  C23C14/12 ,  H01L51/00 ,  C23C14/24 ,  B41J2/00

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20170104159A1

公开(公告)日：2017-04-13

申请号：US15291756

申请日：2016-10-12

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  William E. QUINN ,  Gregory MCGRAW ,  Siddharth HARIKRISHNA MOHAN ,  Elliot H. HARTFORD, Jr. ,  Benjamin SWEDLOVE ,  Gregg KOTTAS ,  Tomasz TROJACKI ,  Julia J. BROWN

IPC: H01L51/00 ,  H01L51/56 ,  H01L51/52 ,  H01L51/50 ,  C23C14/12 ,  C23C14/24

CPC classification number: H01L51/0013 ,  C23C14/12 ,  C23C14/228 ,  C23C14/243 ,  H01L51/008 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/5072 ,  H01L51/5088 ,  H01L51/5092 ,  H01L51/5096 ,  H01L51/5206 ,  H01L51/5221 ,  H01L51/5253 ,  H01L51/56 ,  H01L2251/5353

Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.