Invention Publication
- Patent Title: METHOD AND STRUCTURE FOR 3DIC POWER DISTRIBUTION
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Application No.: US17703700Application Date: 2022-03-24
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Publication No.: US20230154913A1Publication Date: 2023-05-18
- Inventor: Chung-Hao Tsai , Tzu-Chun Tang , Chuei-Tang Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L25/00
- IPC: H01L25/00 ; H01L25/065 ; H01L23/538 ; H01L23/367 ; H01L25/18 ; H01L21/56

Abstract:
Embodiments provide regulated power routing through various inactive features of a device. In one embodiment, such inactive features include a through via wall which can be formed in an encapsulating material of a die stack. In another embodiment, such inactive features include a heat dissipation features formed over the die stack. In another embodiment, such inactive features include dummy via blocks attached adjacent a die cube. Yet other embodiments may combine the features of these embodiments without limitation.
Information query
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