Invention Publication
- Patent Title: ARRAY SUBSTRATE, PREPARATION METHOD THEREOF, AND DISPLAY PANEL
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Application No.: US17047912Application Date: 2020-03-25
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Publication No.: US20230154939A1Publication Date: 2023-05-18
- Inventor: Guangcai YUAN , Xue DONG , Feng GUAN , Yupeng GAO
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Priority: CN 1910392488.X 2019.05.13
- International Application: PCT/CN2020/081172 2020.03.25
- Date entered country: 2020-10-15
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
This disclosure provides an array substrate, a method for preparing the array substrate, and a display panel. The method includes: forming a first thin film transistor and a second thin film transistor on a base substrate. In the formation of an active layer of the first thin film transistor, by using an eutectic point of the catalyst particle and silicon, and a driving factor that the Gibbs free energy of amorphous silicon is greater than that of crystalline silicon (silicon-based nanowire), and due to absorption of the amorphous silicon by the molten catalyst particle to form a supersaturated silicon eutectoid, the silicon nucleates and grows into a silicon-based nanowire. Moreover, during the growth of the silicon-based nanowire, the amorphous silicon film grows linearly along guide structure under the action of the catalyst particle, thus obtaining a silicon-based nanowire with a high density and high uniformity. In addition, by controlling the size of the catalyst particle and the thickness of the amorphous silicon film, the width of the silicon-based nanowire may also be controlled. In this way, a thin film transistor having a silicon-based nanowire with a uniform and controllable size is prepared.
Public/Granted literature
- US11715744B2 Array substrate, preparation method thereof, and display panel Public/Granted day:2023-08-01
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