Invention Publication
- Patent Title: LASER APPARATUS, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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Application No.: US18149986Application Date: 2023-01-04
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Publication No.: US20230155343A1Publication Date: 2023-05-18
- Inventor: Junichi FUJIMOTO , Takahito KUMAZAKI , Akiyoshi SUZUKI
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Main IPC: H01S3/139
- IPC: H01S3/139 ; H01S3/097 ; H01S3/13 ; G01B11/26 ; G01D5/26 ; G03F7/20

Abstract:
A laser apparatus includes a first optical element, a second optical element, a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element, a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element, a first encoder configured to measure a position of the first actuator, a second encoder configured to measure a position of the second actuator, and a processor. The processor reads a first relation and a second relation and performs control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.
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