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1.发明公开公开(公告)号：US20230155343A1
公开(公告)日：2023-05-18
申请号：US18149986
申请日：2023-01-04
Applicant: Gigaphoton Inc.
Inventor： Junichi FUJIMOTO , Takahito KUMAZAKI , Akiyoshi SUZUKI
CPC classification number: H01S3/139 , H01S3/097 , H01S3/1305 , G01B11/26 , G01D5/26 , G03F7/7055 , H01S3/11
Abstract: A laser apparatus includes a first optical element, a second optical element, a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element, a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element, a first encoder configured to measure a position of the first actuator, a second encoder configured to measure a position of the second actuator, and a processor. The processor reads a first relation and a second relation and performs control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.
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公开(公告)号：US20230071592A1
公开(公告)日：2023-03-09
申请号：US18053737
申请日：2022-11-08
Applicant: Gigaphoton Inc.
Inventor： Akira SUWA , Kouji KAKIZAKI , Masakazu KOBAYASHI , Junichi FUJIMOTO , Yasufumi KAWASUJI
IPC: H05K3/46 , H05K3/40 , B23K26/066
Abstract: A laser processing method according to a viewpoint of the present disclosure includes radiating ultraviolet pulse laser light onto a workpiece having a stacked structure in which a conductor layer, an insulating layer, and a sacrificial layer are stacked on each other in the presented order, the pulse laser light radiated from the side facing the sacrificial layer, to change a laser ablation processing mode in the sacrificial layer and form a through hole in the sacrificial layer, radiating the pulse laser light onto the insulating layer through the through hole to form an opening in the insulating layer, and removing the sacrificial layer after the formation of the opening.
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公开(公告)号：US20150055672A1
公开(公告)日：2015-02-26
申请号：US14531876
申请日：2014-11-03
Applicant: Gigaphoton Inc.
Inventor： Akihiko KUROSU , Junichi FUJIMOTO , Yosuke ISHIZUKA , Takashi MATSUNAGA , Osamu WAKABAYASHI
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。
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公开(公告)号：US20160172817A1
公开(公告)日：2016-06-16
申请号：US14956709
申请日：2015-12-02
Applicant: Gigaphoton Inc.
Inventor： Kouji KAKIZAKI , Hiroaki TSUSHIMA , Junichi FUJIMOTO , Natsushi SUZUKI , Hisakazu KATSUUMI
IPC: H01S3/0971 , H01S3/038
CPC classification number: H01S3/09713 , H01S3/0384 , H01S3/08009 , H01S3/0977
Abstract: A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
Abstract translation: 在使用了初步电离的激光装置的激光室中使用的初步电离放电装置包括：电介质管; 设置在电介质管内的初级电离内电极; 以及设置在电介质管外侧的初电离电极。 所述预电离外电极包括：接触板部，被配置为接触所述电介质管; 以及弹性部，其构造成在所述接触板部推压所述电介质管的方向上施加力。
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5.发明申请公开(公告)号：US20130135601A1
公开(公告)日：2013-05-30
申请号：US13681744
申请日：2012-11-20
Applicant: Gigaphoton Inc.
Inventor： Shinji OKAZAKI , Hakaru MIZOGUCHI , Junichi FUJIMOTO , Takashi MATSUNAGA , Kouji KAKIZAKI , Osamu WAKABAYASHI
IPC: G03B27/52
CPC classification number: G03B27/522 , G03F7/70408
Abstract: A two-beam interference apparatus may include a wafer stage on which a wafer may be set, a beam splitter to split first laser light into second and third laser light having a beam intensity distribution elongated in a first direction within a surface of the wafer, and an optical system to guide the second and third laser light onto the wafer. The wafer is irradiated with the second laser light from a second direction perpendicular to the first direction, and the third laser light from a third direction perpendicular to the first direction but different from the second direction, to thereby cause interference of the second and third laser light on the wafer. This apparatus increases the accuracy of the two-beam interference exposure.
Abstract translation: 双光束干涉装置可以包括其上可以设置晶片的晶片台，分束器，用于将第一激光分离成具有沿晶片表面内的第一方向延伸的光束强度分布的第二和第三激光， 以及将第二和第三激光引导到晶片上的光学系统。 从垂直于第一方向的第二方向照射第二激光，从与第一方向垂直但与第二方向不同的第三方向照射第三激光，从而引起第二和第三激光的干涉 光在晶圆上。 该装置增加了双光束干涉曝光的精度。
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Patent Agency Ranking
6.发明公开公开(公告)号：US20240154381A1
公开(公告)日：2024-05-09
申请号：US18408770
申请日：2024-01-10
Applicant: Gigaphoton Inc.
Inventor： Junichi FUJIMOTO , Akira SUWA
CPC classification number: H01S3/09702 , H01S3/038 , H01S3/041 , H01S3/2207
Abstract: A gas laser apparatus includes a voltage application circuit, a chamber device that includes an electrode and is configured to output light generated when a voltage is applied to the electrode from the voltage application circuit, a first pallet that includes a mounting surface on which the chamber device and the voltage application circuit are disposed in parallel with each other, and a housing unit in and out of which the first pallet is movable by movement in an in-plane direction of the mounting surface.
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公开(公告)号：US20160313564A1
公开(公告)日：2016-10-27
申请号：US15201782
申请日：2016-07-05
Applicant: Gigaphoton Inc.
Inventor： Osamu WAKABAYASHI , Kouji KAKIZAKI , Junichi FUJIMOTO
IPC: G02B27/10 , H01S3/23 , G02B19/00 , B23K26/06 , H01L21/02 , H01L21/268 , H01L21/324 , H01L27/12 , H01S3/00 , G02B27/09
CPC classification number: G02B27/1086 , B23K26/0608 , B23K26/0643 , B23K26/0652 , B23K2103/172 , B23K2103/56 , G02B19/0047 , G02B27/0905 , G02B27/0944 , G02B27/0961 , G02B27/0977 , G02B27/48 , H01L21/02422 , H01L21/02532 , H01L21/02592 , H01L21/02686 , H01L21/268 , H01L21/324 , H01L27/1285 , H01S3/005 , H01S3/225 , H01S3/23 , H01S3/2383
Abstract: A laser exposure system may include a plurality of laser devices configured to output laser beams with which an irradiated subject is irradiated, and at least one beam property adjustment unit disposed on optical paths of the laser beams outputted from the plurality of laser devices, and configured to allow beam properties of the laser beams to be approximately a same as each other.
Abstract translation: 激光曝光系统可以包括多个激光装置，其被配置为输出照射对象被照射的激光束;以及至少一个光束特性调整单元，设置在从多个激光装置输出的激光束的光路上，并且被配置 以允许激光束的光束特性彼此大致相同。
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公开(公告)号：US20230387642A1
公开(公告)日：2023-11-30
申请号：US18447510
申请日：2023-08-10
Applicant: Gigaphoton Inc.
Inventor： Junichi FUJIMOTO , Rei TAKENAKA , Masanori TERAMOTO , Jeffrey P. SERCEL
CPC classification number: H01S3/036 , G03F7/70025 , G03F7/70891 , H01S3/038
Abstract: A chamber device includes a housing into which a laser gas is filled, a pair of discharge electrodes generating light from the laser gas when a voltage is applied thereto, a window arranged at a wall surface of the housing and transmitting the light therethrough, a first fan causing the laser gas to flow between the discharge electrodes, a filter, a second fan rotating together with the first fan by a drive force of a drive source of the first fan, a fan-side flow path causing the laser gas filtered by the filter to flow by the second fan and a part of the laser gas to flow in a direction away from the window, and a window-side flow path communicating with the fan-side flow path and causing the laser gas flowing from the fan-side flow path by the second fan to flow toward the window.
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公开(公告)号：US20170336282A1
公开(公告)日：2017-11-23
申请号：US15672961
申请日：2017-08-09
Applicant: The University of Tokyo , GIGAPHOTON INC.
Inventor： Yohei KOBAYASHI , Hakaru MIZOGUCHI , Junichi FUJIMOTO , Katsunori ISOMOTO , Osamu WAKABAYASHI , Georg SOUMAGNE
CPC classification number: G01M11/005 , G01N21/55 , G01N2201/06113 , G01N2201/0697 , G03F7/70033 , G03F7/70175 , G03F7/70591
Abstract: A spheroidal mirror reflectivity measuring apparatus for extreme ultraviolet light may include an extreme ultraviolet light source, an optical system, and a first photosensor. The extreme ultraviolet light source may be configured to output extreme ultraviolet light to a spheroidal mirror that includes a spheroidal reflection surface. The optical system may be configured to allow the extreme ultraviolet light to travel to the spheroidal reflection surface via a first focal position of the spheroidal mirror. The first photosensor may be provided at a second focal position of the spheroidal mirror, and may be configured to detect the extreme ultraviolet light that has passed through the first focal position and then has been reflected by the spheroidal reflection surface.
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公开(公告)号：US20150249312A1
公开(公告)日：2015-09-03
申请号：US14694743
申请日：2015-04-23
Applicant: GIGAPHOTON INC.
Inventor： Hiroaki TSUSHIMA , Hakaru MIZOGUCHI , Junichi FUJIMOTO , Hiroaki NAKARAI , Natsushi SUZUKI
CPC classification number: H01S3/036 , F16C19/06 , F16C32/0402 , F16C32/0406 , F16C33/6696 , F16C2204/02 , F16C2204/10 , F16C2204/52 , F16C2240/40 , F16C2360/46 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/104 , H01S3/1055 , H01S3/134 , H01S3/2232 , H01S3/225 , H01S3/2251 , H01S3/2256
Abstract: There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
Abstract translation: 提供了容纳一对放电电极和气体循环功能的激光室，所述激光室包括：支撑所述气体循环风扇的轴的磁性轴承，所述轴与所述磁性轴承不接触; 以及触控轴承，其构造为当所述磁性轴承不受控制时作为轴承进行操作，所述触地轴承设置有由Au镀层，含Ni镀层和Cu镀层中的一种或多种构成的固体润滑剂。
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