Invention Publication
- Patent Title: PRE-COATING METHOD AND PROCESSING APPARATUS
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Application No.: US17997410Application Date: 2021-04-16
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Publication No.: US20230167547A1Publication Date: 2023-06-01
- Inventor: Ryota IFUKU , Takashi MATSUMOTO , Masahito SUGIURA , Makoto WADA
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-ku, Tokyo
- Priority: JP 20081415 2020.05.01
- International Application: PCT/JP2021/015663 2021.04.16
- Date entered country: 2022-10-28
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/26 ; C23C16/50 ; H01J37/32
Abstract:
A method of pre-coating a carbon film by plasma in a processing container, includes: pre-coating an inner wall of the processing container with a first carbon film by plasma of a first carbon-containing gas under a first pressure; and processing the first carbon film with the plasma under a second pressure.
Information query
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