Invention Publication
- Patent Title: RESIST UNDERLAYER FILM MATERIAL, PATTERNING PROCESS, AND METHOD FOR FORMING RESIST UNDERLAYER FILM
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Application No.: US17984366Application Date: 2022-11-10
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Publication No.: US20230168585A1Publication Date: 2023-06-01
- Inventor: Naoki KOBAYASHI , Daisuke KORI , Yasuyuki YAMAMOTO , Hironori SATOH , Toshiharu YANO
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP 21190440 2021.11.24
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03F7/00 ; G03F7/004 ; G03F7/008 ; G03F7/20 ; G03F7/039

Abstract:
A resist underlayer film material contains (A) a resin having a compound shown in the following general formula (1A), and (B) an organic solvent. Mw/Mn of the compound shown in the general formula (1A) is 1.00≤Mw/Mn≤1.25. This provides: a resist underlayer film material having all of favorable dry etching resistance, heat resistance to 500° C. or higher, and high filling and planarizing properties; and methods for forming a resist underlayer film and patterning processes which use the material.
Information query
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