Invention Publication
- Patent Title: HOME PORT, AND SUBSTRATE PROCESSING APPARATUS AND HOME PORT CLEANING METHOD USING THE SAME
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Application No.: US18073483Application Date: 2022-12-01
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Publication No.: US20230173526A1Publication Date: 2023-06-08
- Inventor: Young Jun SON , Hyung Seok KANG , Min Woo KIM
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20210171537 2021.12.03
- Main IPC: B05B16/80
- IPC: B05B16/80 ; B05B16/20 ; B08B3/04

Abstract:
Proposed are a home port, and a substrate processing apparatus and a home port cleaning method using the same. The home port includes a housing supported by a holder and having a space therein, a nozzle holder provided at an upper portion of the housing and mounting a nozzle for discharging a process liquid to a substrate, an inclined surface formed below the nozzle holder in the space, an exhaust hole exhausting fumes generated in the space of the housing, a rinse supply hole supplying a rinse liquid for removing a residual process liquid remaining on the inclined surface, a hinge provided at a lower portion of the housing and hingedly coupling the housing and the holder to enable rotation of the housing, and an actuating means rotating the housing in a direction in which the inclined surface is parallel to a ground surface on which the housing is installed.
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