Invention Publication
- Patent Title: SCANNING RADICAL SENSOR USABLE FOR MODEL TRAINING
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Application No.: US17545618Application Date: 2021-12-08
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Publication No.: US20230178346A1Publication Date: 2023-06-08
- Inventor: Stephen Moffatt , Martin Hilkene
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; G06F30/20 ; H01L21/66
Abstract:
In an embodiment, a plasma processing tool with an extendable probe is described. In an embodiment, the plasma processing tool comprises a chamber, and a pedestal for supporting a substrate. In an embodiment, an edge ring is around a perimeter of the pedestal. Additionally, a sensor at an end of a probe is provided. In an embodiment, the probe is configured to extend over the pedestal.
Information query
