Invention Publication
- Patent Title: UNLANDED THERMAL DISSIPATION PILLAR ADJACENT ACTIVE CONTACT
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Application No.: US17643023Application Date: 2021-12-07
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Publication No.: US20230178449A1Publication Date: 2023-06-08
- Inventor: Mark D. Levy , Rajendran Krishnasamy , Michael J. Zierak , Siva P. Adusumilli
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Main IPC: H01L23/367
- IPC: H01L23/367 ; H01L29/732 ; H01L23/373 ; H01L29/417

Abstract:
A structure includes an electrical device, and an active contact landed on a portion of the electrical device. The active contact includes a first body of a first material. A thermal dissipation pillar is adjacent the active contact and unlanded on but over the portion of the electrical device. The thermal dissipation pillar includes a second body of a second material having a higher thermal conductivity than the first material. The thermal dissipation pillar may be in thermal communication with a wire in a dielectric layer over the active contact and the thermal dissipation pillar. The electrical device can be any integrated circuit device that generates heat.
Public/Granted literature
- US11972999B2 Unlanded thermal dissipation pillar adjacent active contact Public/Granted day:2024-04-30
Information query
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