Invention Publication
- Patent Title: Complementary Field-Effect Transistor Device
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Application No.: US18060785Application Date: 2022-12-01
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Publication No.: US20230178554A1Publication Date: 2023-06-08
- Inventor: Bilal Chehab , Pieter Schuddinck , Julien Ryckaert , Pieter Weckx
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP 211959.8 2021.12.02
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L23/528 ; H01L29/06 ; H01L29/423 ; H01L29/775

Abstract:
Example embodiments relate to complementary field-effect transistor (CFET) devices. An example CFET device includes a bottom FET device. The bottom FET device includes a bottom channel nanostructure having a first side surface oriented in a first direction. The bottom FET device also includes a second side surface oriented in a second direction opposite the first direction. Further, the bottom FET device includes a bottom gate electrode configured to define a tri-gate or a gate-all-around with respect to the bottom channel nanostructure. The bottom gate electrode includes a side gate portion arranged along the first side surface of the bottom channel nanostructure. The CFET device also includes a top FET device stacked on the bottom FET device. The top FET device includes channel layers, a gate electrode, and gate prongs. Additionally, the CFET device includes a top gate contact via. Further, the CFET device includes a bottom gate contact via.
Information query
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