Invention Publication
- Patent Title: THIN FILM TRANSISTOR AND ARRAY SUBSTRATE
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Application No.: US18103355Application Date: 2023-01-30
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Publication No.: US20230178562A1Publication Date: 2023-06-08
- Inventor: Lizhong WANG , Tianmin ZHOU , Hehe HU , Shuilang DONG , Wenhua WANG , Nianqi YAO
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Priority: CN 1910904728.X 2019.09.24
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
A thin film transistor includes an active layer, a first loose layer and a first oxygen release layer. The first loose layer is at least disposed on a first surface of the active layer perpendicular to a thickness direction of the active layer, and is in contact with the active layer. A material of the first loose layer includes a first inorganic oxide insulating material. The first oxygen release layer is disposed on a surface of the first loose layer facing away from the active layer, and is in contact with the first loose layer. A material of the first oxygen release layer is a first oxygen-containing insulating material. A porosity of the first loose layer is different from a porosity of the first oxygen release layer, and/or an oxygen content of the first loose layer is different from an oxygen content of the first oxygen release layer.
Information query
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