Invention Publication
- Patent Title: Semiconductor Device Structure and Method for Forming the Same
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Application No.: US17663463Application Date: 2022-05-16
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Publication No.: US20230178600A1Publication Date: 2023-06-08
- Inventor: Tsung-Han Chuang , Zhi-Chang Lin , Shih-Cheng Chen , Jung-Hung Chang , Chien Ning Yao , Kai-Lin Chuang , Kuo-Cheng Chiang , Chih-Hao Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/786 ; H01L29/66 ; H01L21/8234

Abstract:
A method for forming a semiconductor device structure is provided. The semiconductor device structure includes a plurality of first nanostructures stacked over a substrate in a vertical direction. The semiconductor device structure includes a first bottom layer formed adjacent to the first nanostructures, and a first insulating layer formed over the first bottom layer. The semiconductor device structure includes a first source/drain (S/D) structure formed over the first insulating layer, and the first insulating layer is in direct contact with one of the first nanostructures.
Information query
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