Invention Publication
- Patent Title: METHOD FOR FORMING A FET DEVICE
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Application No.: US18074294Application Date: 2022-12-02
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Publication No.: US20230178635A1Publication Date: 2023-06-08
- Inventor: Aryan Afzalian , Julien Ryckaert , Naoto Horiguchi , Boon Teik Chan
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP 212148.7 2021.12.03
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/08 ; H01L29/10 ; H01L21/308 ; H01L21/322 ; H01L21/02

Abstract:
A method for forming a FET device is provided, the method including: forming a fin structure; while masking the fin structure from a second side of the fin structure opposite a first side of the fin structure: etching each of first and second fin parts laterally from the first side such that a set of source cavities and a set of drain cavities is formed in first non-channel layers in the first fin part and the second fin part, and subsequently, forming a source body and a drain body, each comprising a respective common body portion along the first side and a set of prongs protruding from the respective common body portion into the source and drain cavities, respectively, and abutting the channel layers; and while masking the fin structure from the first side: etching the third fin part laterally from the second side such that a set of gate cavities extending through the third fin part is formed in second non-channel layers, and subsequently, forming a gate body comprising a common gate body portion along the second side and a set of gate prongs protruding from the common gate body portion into the gate cavities.
Information query
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