- 专利标题: PCM CELL WITH NANOHEATER SURROUNDED WITH AIRGAPS
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申请号: US17643416申请日: 2021-12-09
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公开(公告)号: US20230189672A1公开(公告)日: 2023-06-15
- 发明人: JUNTAO LI , KANGGUO CHENG , DEXIN KONG , RUILONG XIE
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY ARMONK
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY ARMONK
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A phase change memory (PCM) device is provided. The PCM device includes a bottom electrode formed on a substrate, a heater electrode formed on the bottom electrode, the heater electrode having a tapered portion that becomes narrower in a direction away from the substrate. The PCM device also includes an interlayer dielectric (ILD) layer formed on the tapered portion of the heater electrode, the interlayer layer dielectric including an airgap that at least partially surrounds the tapered portion of the heater electrode. The PCM device also includes a phase change layer formed on the heater electrode, and a top electrode formed on the phase change layer.
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