Invention Publication
- Patent Title: SEMICONDUCTOR PACKAGES
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Application No.: US18169161Application Date: 2023-02-14
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Publication No.: US20230197469A1Publication Date: 2023-06-22
- Inventor: Seokhyun Lee , Kyoung Lim Suk , Ae-Nee Jang , Jaegwon Jang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20200140604 2020.10.27
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/00 ; H01L23/498 ; H01L23/485 ; H01L21/60

Abstract:
Disclosed is a semiconductor package comprising a semiconductor chip, an external connection member on the semiconductor chip, and a dielectric film between the semiconductor chip and the external connection member. The semiconductor chip includes a substrate, a front-end-of-line structure on the substrate, and a back-end-of-line structure on the front-end-of-line structure. The back-end-of-line structure includes metal layers stacked on the front-end-of-line structure, a first dielectric layer on the uppermost metal layer and including a contact hole that vertically overlaps a pad of an uppermost metal layer, a redistribution line on the first dielectric layer and including a contact part in the contact hole and electrically connected to the pad, a pad part, and a line part that electrically connects the contact part to the pad part, and an upper dielectric layer on the redistribution line.
Public/Granted literature
- US11869775B2 Semiconductor packages Public/Granted day:2024-01-09
Information query
IPC分类: