Invention Publication
- Patent Title: REPLACEMENT VIA AND BURIED OR BACKSIDE POWER RAIL
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Application No.: US17556414Application Date: 2021-12-20
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Publication No.: US20230197613A1Publication Date: 2023-06-22
- Inventor: Prashant Majhi , Klaus Max Schruefer , Anand Murthy
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/532 ; H01L29/423 ; H01L29/06 ; H01L29/786 ; H01L21/768

Abstract:
An integrated circuit structure includes a first sub-fin, a second sub-fin laterally spaced from the first sub-fin, a first transistor device over the first sub-fin and having a first contact, a second transistor device over the second sub-fin and having a second contact, and a continuous and monolithic body of conductive material extending vertically between the first and second transistor devices and the first and second sub-fins. The body of conductive material has (i) an upper portion between the first and second transistor devices and (ii) a lower portion between the first and second sub-fins. A continuous conformal layer extends along a sidewall of the lower portion of the body and a sidewall of the upper portion of the body. The integrated circuit structure further comprises a conductive interconnect feature connecting the upper portion of the body to at least one of the first and second contacts.
Information query
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