发明公开
- 专利标题: HOLLOW MICROBALLOONS
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申请号: US17914998申请日: 2021-03-31
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公开(公告)号: US20230203234A1公开(公告)日: 2023-06-29
- 发明人: Yasutomo SHIMIZU , Takayoshi KAWASAKI
- 申请人: TOKUYAMA CORPORATION
- 申请人地址: JP Shunan-shi, Yamaguchi
- 专利权人: TOKUYAMA CORPORATION
- 当前专利权人: TOKUYAMA CORPORATION
- 当前专利权人地址: JP Shunan-shi, Yamaguchi
- 优先权: JP 20061827 2020.03.31
- 国际申请: PCT/JP2021/013798 2021.03.31
- 进入国家日期: 2022-09-27
- 主分类号: C08G18/64
- IPC分类号: C08G18/64 ; C08J9/32 ; C08G83/00 ; C08G18/10 ; C08G18/08 ; B24D3/32
摘要:
The hollow microballoons of the invention are hollow microballoons formed of a resin produced by polymerizing a polymerizing composition that contains a polyrotaxane monomer having at least two polymerizable functional groups in the molecule and a polymerizable monomer other than the polyrotaxane monomer having at least two polymerizable functional groups in the molecule. Using the hollow microballoons of the invention, a CMP polishing pad having excellent polishing characteristics and durability can be provided.
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