Invention Publication
- Patent Title: DIE SEAL RING STRUCTURE
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Application No.: US17691130Application Date: 2022-03-10
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Publication No.: US20230260930A1Publication Date: 2023-08-17
- Inventor: Chia-Chen Sun , En-Chiuan Liou
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN 2210128113.4 2022.02.11
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/58

Abstract:
A die seal ring structure includes a metal interconnect structure on a substrate, in which the metal interconnect structure includes an inter-metal dielectric (IMD) layer on the substrate and a first metal interconnection disposed in the IMD layer. Preferably, a first side of the first metal interconnection includes a comb-shape portion in a top view, a second side of the first metal interconnection includes a linear line, a third side of the first metal interconnection includes a linear line, and a fourth side of the first metal interconnection includes a linear line.
Information query
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