Invention Publication
- Patent Title: METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
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Application No.: US17703967Application Date: 2022-03-24
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Publication No.: US20230270017A1Publication Date: 2023-08-24
- Inventor: Hung-Yi Wu , Jia-Rong Wu , Yu-Hsiang Lin , Yi-Wen Chen , Kun-Sheng Yang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN 2210171542.X 2022.02.24
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L21/308

Abstract:
A method for fabricating a semiconductor device includes the steps of forming a magnetic tunneling junction (MTJ) on a substrate, forming a spin orbit torque (SOT) layer on the MTJ, forming an inter-metal dielectric (IMD) layer around the MTJ and the SOT layer, forming a first hard mask on the IMD layer, forming a semiconductor layer on the first hard mask, and then patterning the first hard mask.
Information query
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