CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
摘要:
Disclosed are a carboxylate represented by formula (I), a carboxylic acid generator, a resin, and a resist composition including the same.




wherein R1 and R2 each represent a hydroxy group, —O—R10, etc.; R4, R5, R7 and R8 each represent a halogen atom, a haloalkyl group, etc.; R10 represents an acid-labile group; A1 and A2 each represent a hydrocarbon group; m1 represents an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4, m5 and m7 represent an integer of 0 to 4, 1≤m1+m7≤5, 0≤m2+m8≤5; X0 represents a single bond, a hydrocarbon group which may have a substituent; Rbb1 represents a hydrogen atom, a halogen atom, etc.; X10 represents a single bond, *—O—**, etc.; and L10 represents a single bond or a hydrocarbon group which may have a substituent.
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