Invention Publication
- Patent Title: BACK-END-OF-LINE EDGE COUPLERS WITH A TAPERED GRATING
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Application No.: US17741684Application Date: 2022-05-11
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Publication No.: US20230367067A1Publication Date: 2023-11-16
- Inventor: Yusheng Bian , Rod Augur
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Main IPC: G02B6/124
- IPC: G02B6/124 ; G02B6/13 ; G02B6/122

Abstract:
Structures for an edge coupler and methods of fabricating such structures. The structure comprises a substrate and a back-end-of-line edge coupler including a waveguide core and a grating positioned in a vertical direction between the substrate and the waveguide core. The first waveguide core includes a first longitudinal axis, the grating includes a second longitudinal axis and a plurality of segments positioned with a spaced-apart arrangement along the second longitudinal axis, and the second longitudinal axis is aligned substantially parallel to the first longitudinal axis.
Public/Granted literature
- US12147075B2 Back-end-of-line edge couplers with a tapered grating Public/Granted day:2024-11-19
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