公开(公告)号：US12147075B2

公开(公告)日：2024-11-19

申请号：US17741684

申请日：2022-05-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Rod Augur

IPC: G02B6/30 ,  G02B6/12 ,  G02B6/122 ,  G02B6/124 ,  G02B6/13 ,  G02B6/34 ,  G02B6/42

Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure comprises a substrate and a back-end-of-line edge coupler including a waveguide core and a grating positioned in a vertical direction between the substrate and the waveguide core. The first waveguide core includes a first longitudinal axis, the grating includes a second longitudinal axis and a plurality of segments positioned with a spaced-apart arrangement along the second longitudinal axis, and the second longitudinal axis is aligned substantially parallel to the first longitudinal axis.

公开(公告)号：US20230367067A1

公开(公告)日：2023-11-16

申请号：US17741684

申请日：2022-05-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Rod Augur

IPC: G02B6/124 ,  G02B6/13 ,  G02B6/122

CPC classification number: G02B6/124 ,  G02B6/1228 ,  G02B6/13 ,  G02B2006/12107

Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure comprises a substrate and a back-end-of-line edge coupler including a waveguide core and a grating positioned in a vertical direction between the substrate and the waveguide core. The first waveguide core includes a first longitudinal axis, the grating includes a second longitudinal axis and a plurality of segments positioned with a spaced-apart arrangement along the second longitudinal axis, and the second longitudinal axis is aligned substantially parallel to the first longitudinal axis.