- 专利标题: MEMORY DEVICE AND METHOD FOR MANUFACTURING THEREFOR
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申请号: US18156959申请日: 2023-01-19
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公开(公告)号: US20230371266A1公开(公告)日: 2023-11-16
- 发明人: Minori Kajimoto , Takashi Hirotani , Masahiro Yoshihara
- 申请人: SUNRISE MEMORY CORPORATION
- 申请人地址: US CA San Jose
- 专利权人: SUNRISE MEMORY CORPORATION
- 当前专利权人: SUNRISE MEMORY CORPORATION
- 当前专利权人地址: US CA San Jose
- 优先权: JP 22079389 2022.05.13
- 主分类号: H10B51/20
- IPC分类号: H10B51/20 ; H10B51/10 ; H10B51/30 ; H01L23/528 ; H01L29/786 ; H01L29/66 ; H01L29/78
摘要:
A memory device includes a stacked body of alternately arranged conductor-including layers and insulating films in the first direction and pillar bodies within the stacked body. Each pillar body includes first and second conductive pillars and an insulator pillar located between the first conductive pillar and the second conductive pillar. Each conductor-including layer includes a semiconductor member, an electrode film and a ferroelectric layer provided between the semiconductor member and the electrode film. The semiconductor members in the multiple conductor-including layers are separated from each other in the first direction.
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