发明公开
- 专利标题: MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTABILITY
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申请号: US18319154申请日: 2023-05-17
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公开(公告)号: US20230373781A1公开(公告)日: 2023-11-23
- 发明人: Jan Rockstroh , Achim Bittner , Daniel Hoffmann , Alfons Dehé
- 申请人: Hahn-Schickard-Gesellschaft für angewandte Forschung e. V.
- 申请人地址: DE Villingen-Schwenningen
- 专利权人: Hahn-Schickard-Gesellschaft für angewandte Forschung e. V.
- 当前专利权人: Hahn-Schickard-Gesellschaft für angewandte Forschung e. V.
- 当前专利权人地址: DE Villingen-Schwenningen
- 优先权: EP 174041.8 2022.05.18
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00 ; G02B26/08
摘要:
A MEMS actuator comprising a frame structure and at least one actuator arm. The actuator arm is connected at a first end to the frame structure and at a second end to an actuator body. The MEMS actuator is characterized in that the at least one actuator arm has a meander structure comprising two or more actuator sections. The two or more actuator sections are oriented substantially perpendicular to the longitudinal axis of the actuator arm. Furthermore, the two or more actuator sections comprise at least one layer of an actuator material, wherein a movement of the actuator body can be effected by actuating the two or more actuator sections. Further disclosed is a method for producing the MEMS actuator.
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