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公开(公告)号：US11800294B2
公开(公告)日：2023-10-24
申请号：US17758923
申请日：2021-01-15
发明人： Alfons Dehé , Achim Bittner , Lenny Castellanos
CPC分类号： H04R17/005 , H04R7/125 , H04R17/10 , H04R31/003 , H04R2201/003
摘要： The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.
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公开(公告)号：US20240133802A1
公开(公告)日：2024-04-25
申请号：US18548517
申请日：2022-03-04
发明人： Achim BITTNER , Alfons DEHÉ , Ananya SRIVASTAVA
IPC分类号： G01N21/17 , B81C1/00 , G01N21/3504 , G01N29/24
CPC分类号： G01N21/1702 , B81C1/00047 , G01N21/3504 , G01N29/2425 , B81C2201/019 , G01N2021/1704
摘要： In a first aspect, the invention relates to a method for producing a gas-filled reference chamber which is hermetically sealed. Thereby, the gas with which the reference chamber is filled is introduced via an opening in a separate coating chamber only after bonding of the wafers forming the reference chamber. The reference chamber preferably contains MEMS devices.
In another aspect, the invention relates to a photoacoustic gas sensor comprising such a reference chamber within which a MEMS sensor is present.-
公开(公告)号：US11874218B2
公开(公告)日：2024-01-16
申请号：US17310465
申请日：2020-02-11
发明人： Daniel Biesinger , Achim Bittner
CPC分类号： G01N21/1702 , G01N33/0027 , G01N2021/1704 , G01N2201/061
摘要： The invention relates to a modulatable infrared emitter comprising a heating element, a planar base element, a dielectric interlayer, and a planar cover element which is a structured metamaterial, and an actuator, wherein the actuator is configured for a relative movement of the cover element and the base element between a first and a second position in order to modulate the intensity of the emission of the infrared emitter. The invention further relates to production methods for the infrared emitter, methods for the modulated emission of infrared red radiation by means of the infrared emitter, and preferred uses of the infrared emitter. A system comprising the infrared emitter and a control device for regulating the actuator are also preferably the subject matter of the invention.
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公开(公告)号：US11879784B2
公开(公告)日：2024-01-23
申请号：US17250852
申请日：2019-09-13
发明人： Alfons Dehé , Achim Bittner , Daniel Biesinger
IPC分类号： G01N21/17 , G01J5/08 , G01J3/10 , G01N21/3504 , B81B7/02
CPC分类号： G01J5/0896 , B81B7/02 , G01J3/108 , G01N21/1702 , G01N21/3504 , B81B2201/032 , B81B2201/033 , H05B2203/032
摘要： The invention relates to a modulatable infrared emitter comprising a MEMS heating element and an actuator, wherein the actuator triggers shape and/or structure changes of the MEMS heating element. Said change in shape and/or structure of the MEMS heating element may vary the ratio of the emitting area to the total area, thereby producing a change in intensity of the emitted infrared beam. The invention further relates to a manufacturing method for the infrared emitter, a method for modulated emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further preferred aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.
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公开(公告)号：US20220107263A1
公开(公告)日：2022-04-07
申请号：US17310465
申请日：2020-02-11
发明人： Daniel Biesinger , Achim Bittner
摘要： The invention relates to a modulatable infrared emitter comprising a heating element, a planar base element, a dielectric interlayer, and a planar cover element which is a structured metamaterial, and an actuator, wherein the actuator is configured for a relative movement of the cover element and the base element between a first and a second position in order to modulate the intensity of the emission of the infrared emitter. The invention further relates to production methods for the infrared emitter, methods for the modulated emission of infrared red radiation by means of the infrared emitter, and preferred uses of the infrared emitter. A system comprising the infrared emitter and a control device for regulating the actuator are also preferably the subject matter of the invention.
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公开(公告)号：US20210389194A1
公开(公告)日：2021-12-16
申请号：US17288473
申请日：2019-10-24
发明人： Achim Bittner , Bernd Folkmer , Mohamed Bourouah
摘要： The invention relates to a strain-measuring structure, comprising a carrier, which is divided into regions along the predetermined breaking points only after being joined to the object to be measured. After the separation along the predetermined breaking points, the regions individually joined in the joining zones can be moved freely relative to one another in the event of strain of the object, without the strain-measuring structure applying significant forces to the object to be measured, which could distort the strain measurement. Measuring assemblies for measuring strain lie between the regions. Said measuring assemblies can be based on different principles, depending on the application. The invention further relates to a method for producing the strain-measuring structure, to a method for measuring the strain of objects, and to the use of the structure to measure strain. The invention further preferably relates to a system comprising the strain-measuring structure and a control device for reading out and preferably activating and joining the structure.
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公开(公告)号：US20240230521A9
公开(公告)日：2024-07-11
申请号：US18548517
申请日：2022-03-04
发明人： Achim BITTNER , Alfons DEHÉ , Ananya SRIVASTAVA
IPC分类号： G01N21/17 , B81C1/00 , G01N21/3504 , G01N29/24
CPC分类号： G01N21/1702 , B81C1/00047 , G01N21/3504 , G01N29/2425 , B81C2201/019 , G01N2021/1704
摘要： In a first aspect, the invention relates to a method for producing a gas-filled reference chamber which is hermetically sealed. Thereby, the gas with which the reference chamber is filled is introduced via an opening in a separate coating chamber only after bonding of the wafers forming the reference chamber. The reference chamber preferably contains MEMS devices.
In another aspect, the invention relates to a photoacoustic gas sensor comprising such a reference chamber within which a MEMS sensor is present.-
8.发明公开公开(公告)号：US20240167896A1
公开(公告)日：2024-05-23
申请号：US18548528
申请日：2022-03-01
发明人： Bernd FOLKMER , Thorsten HEHN , Manuel KOEHLER
摘要： The invention preferably relates to an apparatus for measuring deformations, stresses, forces and/or torques of an object comprising a spring body and a sensor chip, which comprises one or more sensor elements for measuring a deformation, stress, force and/or a torque as well as an electronic circuit on a substrate. The spring body comprises a base plate on the front side of which a force conductor, preferably in the form of a pin, is installed, the sensor chip being positioned on the rear side of the base plate below the force conductor. The invention further relates to a system comprising a described apparatus and a data processing unit, wherein the data processing unit is configured for reading out measured data detected by the sensor chip and preferably detects the forces and/or torques acting on the force conductor based thereon.
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公开(公告)号：US20230373781A1
公开(公告)日：2023-11-23
申请号：US18319154
申请日：2023-05-17
发明人： Jan Rockstroh , Achim Bittner , Daniel Hoffmann , Alfons Dehé
CPC分类号： B81B3/0043 , B81C1/00158 , G02B26/0833 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81C2201/0132 , B81B2203/055 , B81B2203/0127
摘要： A MEMS actuator comprising a frame structure and at least one actuator arm. The actuator arm is connected at a first end to the frame structure and at a second end to an actuator body. The MEMS actuator is characterized in that the at least one actuator arm has a meander structure comprising two or more actuator sections. The two or more actuator sections are oriented substantially perpendicular to the longitudinal axis of the actuator arm. Furthermore, the two or more actuator sections comprise at least one layer of an actuator material, wherein a movement of the actuator body can be effected by actuating the two or more actuator sections. Further disclosed is a method for producing the MEMS actuator.
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公开(公告)号：US20240279049A1
公开(公告)日：2024-08-22
申请号：US18570858
申请日：2022-06-17
发明人： Achim BITTNER , Alfons DEHÉ
CPC分类号： B81B3/0051 , B81C1/00158 , B81B2201/0257 , B81B2203/0127 , B81B2203/0315 , B81C2203/035
摘要： In a first aspect, the invention relates to a system comprising a MEMS microphone comprising a sound inlet opening, a vibratable microphone membrane and an electronic circuit, wherein when the microphone membrane is excited by sound waves entering through the sound inlet opening, an electrical signal that is dependent on the sound waves is generated by vibrations of the microphone membrane. A damping element for reducing the sound pressure level of the sound waves acting on the microphone membrane is mounted in front of the sound inlet opening, wherein the damping element comprises an elastic and vibratable damping membrane and wherein, in addition to the microphone membrane, the damping element is induced into vibrations by the sound waves such that the sound energy of the sound waves is divided between the damping membrane and the microphone membrane. This makes it possible in particular to extend the measuring range of the MEMS microphone without distortion to high sound pressure levels that could not previously be measured with the MEMS microphones known in the prior art.
In a further aspect, the invention relates to the use of the system according to the invention for aeroacoustic measurements, preferably for measuring sound pressure waves on surfaces of a vehicle component.
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