-
公开(公告)号：US12111249B2
公开(公告)日：2024-10-08
申请号：US17638665
申请日：2020-08-31
发明人： Alfons Dehé , Achim Bittner , Lenny Castellanos , Sophie Billat , Frank Hedrich
CPC分类号： G01N21/1702 , G01N29/2425 , G01N2021/1704 , G01N2021/1708 , G01N2201/0686
摘要： In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate.
In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.-
公开(公告)号：US11879784B2
公开(公告)日：2024-01-23
申请号：US17250852
申请日：2019-09-13
发明人： Alfons Dehé , Achim Bittner , Daniel Biesinger
IPC分类号： G01N21/17 , G01J5/08 , G01J3/10 , G01N21/3504 , B81B7/02
CPC分类号： G01J5/0896 , B81B7/02 , G01J3/108 , G01N21/1702 , G01N21/3504 , B81B2201/032 , B81B2201/033 , H05B2203/032
摘要： The invention relates to a modulatable infrared emitter comprising a MEMS heating element and an actuator, wherein the actuator triggers shape and/or structure changes of the MEMS heating element. Said change in shape and/or structure of the MEMS heating element may vary the ratio of the emitting area to the total area, thereby producing a change in intensity of the emitted infrared beam. The invention further relates to a manufacturing method for the infrared emitter, a method for modulated emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further preferred aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.
-
公开(公告)号：US20230373781A1
公开(公告)日：2023-11-23
申请号：US18319154
申请日：2023-05-17
发明人： Jan Rockstroh , Achim Bittner , Daniel Hoffmann , Alfons Dehé
CPC分类号： B81B3/0043 , B81C1/00158 , G02B26/0833 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81C2201/0132 , B81B2203/055 , B81B2203/0127
摘要： A MEMS actuator comprising a frame structure and at least one actuator arm. The actuator arm is connected at a first end to the frame structure and at a second end to an actuator body. The MEMS actuator is characterized in that the at least one actuator arm has a meander structure comprising two or more actuator sections. The two or more actuator sections are oriented substantially perpendicular to the longitudinal axis of the actuator arm. Furthermore, the two or more actuator sections comprise at least one layer of an actuator material, wherein a movement of the actuator body can be effected by actuating the two or more actuator sections. Further disclosed is a method for producing the MEMS actuator.
-
公开(公告)号：US11800294B2
公开(公告)日：2023-10-24
申请号：US17758923
申请日：2021-01-15
发明人： Alfons Dehé , Achim Bittner , Lenny Castellanos
CPC分类号： H04R17/005 , H04R7/125 , H04R17/10 , H04R31/003 , H04R2201/003
摘要： The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.
-
公开(公告)号：US11726029B2
公开(公告)日：2023-08-15
申请号：US17250856
申请日：2019-09-13
发明人： Alfons Dehé , Achim Bittner , Daniel Biesinger
CPC分类号： G01N21/1702 , G01N33/0027 , G02B26/04 , G01N2021/1704
摘要： The invention relates to a modulatable infrared emitter comprising an aperture structure, a structured micro-heating element, and an actuator, wherein the aperture structure and the structured micro-heating element are movable relative to each other in parallel planes by means of the actuator to modulate the intensity of emitted infrared radiation. The invention further relates to methods of manufacturing the infrared emitter, a method of modulating emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.
-
公开(公告)号：US20230242394A1
公开(公告)日：2023-08-03
申请号：US18004527
申请日：2021-07-01
发明人： Achim Bittner , Alfons Dehé
CPC分类号： B81C1/00309 , B81B7/0061 , B81C2203/0136 , B81C2203/0707 , B81B2201/0257 , B81B2201/047 , B81B2201/0214 , B81B2201/0271 , B81B2207/012 , B81B2207/015 , B81B2203/0127 , B81B2207/07
摘要： Preferably, the invention relates to a MEMS package having at least one layer for protecting a MEMS element, wherein the MEMS element has at least one MEMS interaction region on a substrate and a surface conformal coating of the MEMS element is applied with a dielectric layer. Particularly preferably, the invention relates to a MEMS transducer package in which a MEMS element, for example with a MEMS membrane and processor, preferably an integrated circuit, are present on a substrate. For protection, a surface conformal coating of a dielectric is preferably first applied to the MEMS element, for example by spray coating, mist coating, and/or vapor coating. Then, preferably, an electrically conductive layer is applied. Depending on the configuration, the layers may be removed in some regions above a MEMS interaction region of the MEMS element, for example for a sound port of a MEMS membrane.
-
公开(公告)号：US20230047856A1
公开(公告)日：2023-02-16
申请号：US17758923
申请日：2021-01-15
发明人： Alfons Dehé , Achim Bittner , Lenny Castellanos
摘要： The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.
-
-
-
-
-
-
搜索结果
7 条记录 (耗时 0.02 秒)
