Invention Publication
- Patent Title: METHOD FOR MANUFACTURING OXIDE SEMICONDUCTOR DEVICE
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Application No.: US18231902Application Date: 2023-08-09
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Publication No.: US20230387136A1Publication Date: 2023-11-30
- Inventor: Shunpei Yamazaki , Hiroki Ohara , Toshinari Sasaki , Kosei Noda , Hideaki Kuwabara
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi
- Priority: JP 09179773 2009.07.31
- The original application number of the division: US12846534 2010.07.29
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/51 ; G02F1/1333 ; G02F1/1337 ; G02F1/1343 ; G02F1/1362 ; G02F1/1368 ; H01L29/24

Abstract:
An object is to provide a semiconductor device having a structure with which parasitic capacitance between wirings can be sufficiently reduced. An oxide insulating layer serving as a channel protective layer is formed over part of an oxide semiconductor layer overlapping with a gate electrode layer. In the same step as formation of the oxide insulating layer, an oxide insulating layer covering a peripheral portion of the oxide semiconductor layer is formed. The oxide insulating layer which covers the peripheral portion of the oxide semiconductor layer is provided to increase the distance between the gate electrode layer and a wiring layer formed above or in the periphery of the gate electrode layer, whereby parasitic capacitance is reduced.
Public/Granted literature
- US12183743B2 Semiconductor device Public/Granted day:2024-12-31
Information query
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