- 专利标题： APPARATUS FOR LASER ANNEALING AND OPERATING METHOD THEREOF
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申请号： US17580708申请日： 2022-01-21
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公开(公告)号： US20230047722A1公开(公告)日： 2023-02-16
- 发明人: SANGMIN LEE , SEULGI LEE , SUNGWOOK JUNG , HYUKJUN KWON , HYANGROK LEE
- 申请人： SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址： KR Suwon-Si
- 专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址： KR Suwon-Si
- 优先权： KR10-2021-0105958 20210811
- 主分类号： G02B27/09
- IPC分类号： G02B27/09 ; G02B27/28 ; G02B27/10 ; G02B27/14 ; G02B3/00 ; B23K26/00 ; B23K26/067 ; B23K26/06
摘要：
A method of operating an apparatus for laser annealing, includes reducing temporal or spatial coherency of a plurality of laser beams by beam superimposing; and reducing an electric field inner product magnitude of beams having the reduced temporal or spatial coherency by a fly eye lens array to reduce coherency, and/or by modifying a polarization state between the beams by beam superimposing.