Invention Application
- Patent Title: ELECTROPLATING APPARATUS AND ELECTROPLATING METHOD
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Application No.: US17745809Application Date: 2022-05-16
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Publication No.: US20230124732A1Publication Date: 2023-04-20
- Inventor: Heng-Ming Nien , Chih-Chiang Lu , Cho-Ying Wu , Shih-Lian Cheng
- Applicant: Unimicron Technology Corp.
- Applicant Address: TW Taoyuan City
- Assignee: Unimicron Technology Corp.
- Current Assignee: Unimicron Technology Corp.
- Current Assignee Address: TW Taoyuan City
- Priority: TW111113003 20220406
- Main IPC: C25D5/00
- IPC: C25D5/00

Abstract:
An electroplating apparatus including an anode and a cathode, a power supply, and a regulating plate is provided. The power supply is electrically connected to the anode and the cathode. The regulating plate is arranged between the anode and the cathode. The regulating plate includes an insulating grid plate and a plurality of magnetic components. The plurality of magnetic components are uniformly and randomly arranged on the insulating grid plate. An electroplating method is also provided.
Public/Granted literature
- US11686008B2 Electroplating apparatus and electroplating method Public/Granted day:2023-06-27
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