- 专利标题： FLUID CONTROL DEVICE, FLUID CONTROL SYSTEM AND FLUID CONTROL METHOD
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申请号： US18047577申请日： 2022-10-18
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公开(公告)号： US20230140776A1公开(公告)日： 2023-05-04
- 发明人: Kenichi OE , Daichi KUNITA , Kazuya SHAKUDO
- 申请人： HORIBA STEC, Co., Ltd.
- 申请人地址： JP Kyoto-shi
- 专利权人： HORIBA STEC, Co., Ltd.
- 当前专利权人： HORIBA STEC, Co., Ltd.
- 当前专利权人地址： JP Kyoto-shi
- 优先权： JP2021-177284 20211029
- 主分类号： G05D7/06
- IPC分类号： G05D7/06 ; F16K27/00
摘要：
A fluid control device includes a body inside which is formed a flow path, a fluid control valve that is mounted on the body and controls a fluid flowing through the flow path, and a casing that is mounted on the body in such a way as to house the fluid control valve. A sloping surface that slopes towards the body is formed on a top surface of the casing, which is a surface facing towards an opposite side from the body.