• 专利标题: SELF-PACKING THREE-ARM THERMAL SCANNING PROBE FOR MICRO-NANO MANUFACTURING
  • 申请号: US17767904
    申请日: 2021-06-18
  • 公开(公告)号: US20240002220A1
    公开(公告)日: 2024-01-04
  • 发明人: Huan HURenwei MAO
  • 申请人: ZHEJIANG UNIVERSITY
  • 申请人地址: CN Hangzhou, Zhejiang
  • 专利权人: ZHEJIANG UNIVERSITY
  • 当前专利权人: ZHEJIANG UNIVERSITY
  • 当前专利权人地址: CN Hangzhou, Zhejiang
  • 优先权: CN 2010662491.1 2020.07.10
  • 国际申请: PCT/CN2021/100920 2021.06.18
  • 进入国家日期: 2022-04-10
  • 主分类号: B81C99/00
  • IPC分类号: B81C99/00 G01Q80/00 G01Q70/10 G01Q70/14
SELF-PACKING THREE-ARM THERMAL SCANNING PROBE FOR MICRO-NANO MANUFACTURING
摘要:
The present disclosure discloses a self-packing three-arm thermal scanning probe for micro-nano manufacturing, comprising: a three-arm cantilever beam, metal contact pads, a nichrome heating electrode for printing, a nichrome heating electrode for transportation, and a polymer storage area. The present disclosure is manufactured by conventional micro-nano machining processes such as lithography and wet etching. In the present disclosure, a gradient density design of heating electrodes is used to generated continuous change of temperature gradients, thus realizing continuous transportation of a printing material from a storage area to a tip area, which realizes self-packing. The present disclosure can be seamlessly integrated with a CMOS process, and a printed material can be completely eliminated by means of commonly used acetone or oxygen plasma in the CMOS process, without contamination; furthermore, the micro-nano machining method of the present disclosure only requires an atomic force microscope whose cost is very low.
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