- 专利标题: METHOD AND APPARATUS FOR IMAGING NONSTATIONARY OBJECT
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申请号: US18039373申请日: 2021-11-16
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公开(公告)号: US20240004313A1公开(公告)日: 2024-01-04
- 发明人: Coen Adrianus VERSCHUREN , Ferry ZIJP , Nitesh PANDEY , Alexander Prasetya KONIJNENBERG
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 优先权: EP 210884.1 2020.12.01
- 国际申请: PCT/EP2021/081764 2021.11.16
- 进入国家日期: 2023-05-30
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G01B11/27 ; G01N21/956 ; G02B27/64
摘要:
Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system.
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