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公开(公告)号：US20240152060A1
公开(公告)日：2024-05-09
申请号：US18282305
申请日：2022-02-17
发明人： Patrick Philipp HELFENSTEIN , Scott Anderson MIDDLEBROOKS , Maxim PISARENCO , Markus Gerardus Martinus Maria VAN KRAAIJ , Alexander Prasetya KONIJNENBERG
IPC分类号： G03F7/00
CPC分类号： G03F7/705 , G03F7/70575 , G03F7/70675
摘要： A method and system for predicting process information (e.g., phase data) using a given input (e.g., intensity) to a parameterized model are described. A latent space of a given input is determined based on dimensional data in a latent space of the parameterized model for a given input to the parameterized model. Further, an optimum latent space is determined by constraining the latent space with prior information (e.g., wavelength) that enables converging to a solution that causes more accurate predictions of the process information. The optimum latent space is used to predict the process information. The given input may be a measured amplitude (e.g., intensity) associated with the complex electric field image. The predicted process information can be complex electric field image having amplitude data and phase data. The parameterized model comprises variational encoder-decoder architecture.
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公开(公告)号：US20230064193A1
公开(公告)日：2023-03-02
申请号：US17796641
申请日：2021-01-20
发明人： Patricius Aloysius Jacobus TINNEMANS , Patrick WARNAAR , Vasco Tomas TENNER , Hugo Augustinus Joseph CRAMER , Bram Antonius Gerardus LOMANS , Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN , Ahmet Burak CUNBUL , Alexander Prasetya KONIJNENBERG
摘要： Disclosed is a method of measuring a periodic structure on a substrate with illumination radiation having at least one wavelength, the periodic structure having at least one pitch. The method comprises configuring, based on a ratio of said pitch and said wavelength, one or more of: an illumination aperture profile comprising one or more illumination regions in Fourier space; an orientation of the periodic structure for a measurement; and a detection aperture profile comprising one or more separated detection regions in Fourier space. This configuration is such that: i) diffracted radiation of at least a pair of complementary diffraction orders is captured within the detection aperture profile, and ii) said diffracted radiation fills at least 80% of the one or more separated detection regions. The periodic structure is measured while applying the configured one or more of illumination aperture profile, detection aperture profile and orientation of the periodic structure.
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公开(公告)号：US20220299888A1
公开(公告)日：2022-09-22
申请号：US17619961
申请日：2020-05-14
摘要： Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system; and determining the complex-valued field from the imaging data based on the imposed modulation functions.
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公开(公告)号：US20240004313A1
公开(公告)日：2024-01-04
申请号：US18039373
申请日：2021-11-16
IPC分类号： G03F7/00 , G01B11/27 , G01N21/956 , G02B27/64
CPC分类号： G03F7/706851 , G03F7/70633 , G03F7/7065 , G01B11/272 , G01N21/956 , G02B27/646 , G01N2201/063
摘要： Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system.
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公开(公告)号：US20230004096A1
公开(公告)日：2023-01-05
申请号：US17780960
申请日：2020-09-28
发明人： Scott Anderson MIDDLEBROOKS , Patrick WARNAAR , Patrick Philipp HELFENSTEIN , Alexander Prasetya KONIJNENBERG , Maxim PISARENCO , Markus Gerardus Martinus Maria VAN KRAAIJ
摘要： A method and system for predicting complex electric field images with a parameterized model are described. A latent space representation of a complex electric field image is determined based on dimensional data in a latent space of the parameterized model for a given input to the parameterized model. The given input may be a measured amplitude (e.g., intensity) associated with the complex electric field image. The complex electric field image is predicted based on the latent space representation of the complex electric field image. The predicted complex electric field image includes an amplitude and a phase. The parameterized model comprises encoder-decoder architecture. In some embodiments, determining the latent space representation of the electric field image comprises minimizing a function constrained by a set of electric field images that could be predicted by the parameterized model based on the dimensional data in the latent space and the given input.
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公开(公告)号：US20220299886A1
公开(公告)日：2022-09-22
申请号：US17638975
申请日：2020-07-31
摘要： Disclosed is a method of measuring a structure, and associated metrology device and computer program. The method comprises obtaining an amplitude profile of scattered radiation relating to a measurement of a first structure on a first substrate and obtaining a reference phase profile relating to a reference measurement of at least one reference structure on a reference substrate. The at least one reference structure is not the same structure as said first structure but is nominally identical in terms of at least a plurality of key parameters. The method further comprises determining a complex-valued field to describe the first structure from the amplitude profile and reference phase profile.
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