Invention Publication
- Patent Title: VERTICAL ULTRA-THIN PCM CELL
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Application No.: US17855131Application Date: 2022-06-30
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Publication No.: US20240008374A1Publication Date: 2024-01-04
- Inventor: Kevin W. Brew , Timothy Mathew Philip , JIN PING HAN , Ching-Tzu Chen , Injo Ok
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Memory cells and methods of forming the same include forming a hole in an interlayer dielectric to expose an end of a conductive top electrode. A phase change material is conformally deposited on surfaces of the hole. A remaining portion of the hole is filled with a dielectric material after conformally depositing the phase change material.
Information query
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