Invention Publication
- Patent Title: STACKED FIELD EFFECT TRANSISTOR CONTACTS
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Application No.: US17860082Application Date: 2022-07-07
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Publication No.: US20240014135A1Publication Date: 2024-01-11
- Inventor: Junli Wang , Albert M. Chu , Albert M. Young , Chen Zhang , Su Chen Fan , Ruilong Xie
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/48 ; H01L21/8234 ; H01L29/786

Abstract:
A semiconductor device including a first source/drain region (S/D) located on a frontside of a substrate, wherein the first source/drain region has a first width, a second S/D region located on the frontside of the substrate, wherein the second source/drain region is located above the first source drain region, wherein the second source/drain region has second width, wherein the first width is larger than the second width, a first power rail located on a backside of the substrate, a second power rail located on the backside of the substrate, a first connector in contact with the first source/drain region, wherein the first connector is only in contact with a sidewall of the first source/drain region, and a second connector in contact with the second source/drain region, wherein the second connector is in contact with a top surface and a side surface of the second source/drain region.
Information query
IPC分类: