Invention Publication
- Patent Title: IMAGE SENSOR
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Application No.: US18331343Application Date: 2023-06-08
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Publication No.: US20240014241A1Publication Date: 2024-01-11
- Inventor: Wook LEE , Seonghoon KO , Jaeho KIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220084620 2022.07.08
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor includes a dual vertical gate including two vertical portions apart from each other by an isolation area in a first direction and vertically extending into a substrate, a connection portion configured to connect the two vertical portions to each other on the two vertical portions, and a device isolation layer on side surfaces of the vertical portions in the first direction, wherein each of the two vertical portions includes an upper vertical portion and a lower vertical portion, a sidewall of the upper vertical portion forms a first inclination angle with a line extending in the first direction, a sidewall of the lower vertical portion forms a second inclination angle with the line extending in the first direction, and the first inclination angle is different from the second inclination angle.
Information query
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