DISPLAY METHOD AND INFORMATION PROCESSING APPARATUS
Abstract:
A display method includes acquiring history information of data, including sensor data detecting a state of a substrate processing apparatus and image data displaying the state of the substrate processing apparatus, from a plurality of pieces of data managed by the substrate processing apparatus; acquiring alarm information including a date and time of occurrence at which a specific event occurred in the substrate processing apparatus; determining, as trace information to be displayed, sensor data for a specific period including the date and time of occurrence included in the alarm information, among the history information of the data; determining, as video image information to be displayed, image data for the specific period including the date and time of occurrence included in the alarm information, among the history information of the data; and displaying, on a display, at least one of the trace information and the video image information.
Public/Granted literature
Information query
Patent Agency Ranking
0/0