A vacuum pump and a control device, on a pump side, performs heater control of a pipe to suppress precipitation of a deposit from a process gas and cooling control of a deposit trap to remove the deposit, and perform heater control and cooling control the process gas situation. A temperature sensor is disposed on an outer periphery or an inner periphery of an introduction pipe 3H, outputs temperature information a control device. Temperature information from the inside of a deposit trap is also sent to control device. The control device, performs ON/OFF control a heater such that a temperature of the introduction pipe 3H has a predetermined temperature value, based on the input temperature information 31. The control device, performs opening/closing control on a valve such that an internal temperature of the deposit trap has a predetermined cooling temperature value, based on the input temperature information.