Invention Publication
- Patent Title: Angular Velocity Detection Element And Angular Velocity Sensor
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Application No.: US18456801Application Date: 2023-08-28
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Publication No.: US20240069057A1Publication Date: 2024-02-29
- Inventor: Seiichiro OGURA , Keiichi YAMAGUCHI , Ryuta NISHIZAWA
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 22136281 2022.08.29
- Main IPC: G01P3/44
- IPC: G01P3/44

Abstract:
An angular velocity detection element includes: a drive vibration arm configured to perform flexural vibration according to an applied drive signal; and a detection vibration arm configured to perform flexural vibration according to an applied angular velocity. Each of the drive vibration arm and the detection vibration arm has a bottomed groove portion along an extending direction. d2/t2>d1/t1, in which t1 is a thickness of the drive vibration arm, d1 is a depth of the groove portion of the drive vibration arm, t2 is a thickness of the detection vibration arm, and d2 is a depth of the groove portion of the detection vibration arm.
Information query
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