公开(公告)号：US20240069057A1

公开(公告)日：2024-02-29

申请号：US18456801

申请日：2023-08-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01P3/44

CPC classification number: G01P3/44

Abstract: An angular velocity detection element includes: a drive vibration arm configured to perform flexural vibration according to an applied drive signal; and a detection vibration arm configured to perform flexural vibration according to an applied angular velocity. Each of the drive vibration arm and the detection vibration arm has a bottomed groove portion along an extending direction. d2/t2>d1/t1, in which t1 is a thickness of the drive vibration arm, d1 is a depth of the groove portion of the drive vibration arm, t2 is a thickness of the detection vibration arm, and d2 is a depth of the groove portion of the detection vibration arm.

公开(公告)号：US20230188109A1

公开(公告)日：2023-06-15

申请号：US18077259

申请日：2022-12-08

Applicant: SEIKO EPSON CORPORATION

Inventor： Keiichi YAMAGUCHI ,  Hiyori SAKATA ,  Shigeru SHIRAISHI ,  Ryuta NISHIZAWA

IPC: H03H3/02 ,  H03H9/215

CPC classification number: H03H3/02 ,  H03H9/215 ,  H03H2003/026

Abstract: Provided is a method for manufacturing a vibrator element including a first vibration arm and a second vibration arm that each have a first surface and a second surface. The manufacturing method includes a preparation step of preparing a quartz crystal substrate, a first protective film forming step of forming a first protective film on a first substrate surface of the quartz crystal substrate, a first dry etching step of dry etching the quartz crystal substrate via the first protective film, a second protective film forming step of forming a second protective film on a second substrate surface of the quartz crystal substrate, and a second dry etching step of dry etching the quartz crystal substrate via the second protective film. Outer shapes of the first vibration arm and the second vibration arm are formed from the first surface to the second surface in the first dry etching step, and the outer shapes of the first vibration arm and the second vibration arm are not formed in the second dry etching step.

公开(公告)号：US20220236057A1

公开(公告)日：2022-07-28

申请号：US17718418

申请日：2022-04-12

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  B60R16/023 ,  G01C19/5656 ,  G01P15/18 ,  G01C19/5607 ,  G01C19/56

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US20220178694A1

公开(公告)日：2022-06-09

申请号：US17679272

申请日：2022-02-24

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Seiichiro OGURA ,  Keiichi YAMAGUCHI

IPC: G01C19/5705

Abstract: Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0

公开(公告)号：US20220173715A1

公开(公告)日：2022-06-02

申请号：US17456237

申请日：2021-11-23

Applicant: Seiko Epson Corporation

Inventor： Junichi TAKEUCHI ,  Tomoyuki KAMAKURA ,  Ryuta NISHIZAWA ,  Yukihiro HASHI

IPC: H03H9/09 ,  H03H9/05 ,  H03H9/125

Abstract: A resonator device includes: a base; a resonator element that includes a resonator substrate and an electrode; a conductive layer that is disposed on the base; a metal bump that is disposed between the conductive layer and the resonator element, and that electrically couples the conductive layer and the electrode while bonding the conductive layer and the resonator element; and at least one of a first low elastic modulus layer that is interposed between the base and the conductive layer, that overlaps the metal bump in a plan view of the base, and that has an elastic modulus smaller than that of the metal bump, and a second low elastic modulus layer that is interposed between the resonator substrate and the electrode, that overlaps the metal bump in the plan view of the base, and that has an elastic modulus smaller than that of the metal bump.

公开(公告)号：US20210367583A1

公开(公告)日：2021-11-25

申请号：US17322948

申请日：2021-05-18

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Atsushi MATSUO ,  Keiichi YAMAGUCHI ,  Taku MATSUNAGA

IPC: H03H9/19 ,  H03B5/32 ,  G01K7/32

Abstract: A vibration device includes a quartz substrate including a first vibration section, a second vibration section, and a third vibration section, a pair of first excitation electrodes formed at two principal surfaces of the quartz substrate, a pair of second excitation electrodes so formed as to sandwich the second vibration section in the thickness direction of the quartz substrate, and a pair of third excitation electrodes so formed as to sandwich the third vibration section in the thickness direction of the quartz substrate. At least one of the pair of second excitation electrodes is formed at a first inclining surface that inclines with respect to the two principal surfaces. At least one of the pair of third excitation electrodes is formed at a second inclining surface that inclines with respect to the two principal surfaces. The second inclining surface inclines with respect to the first inclining surface.

公开(公告)号：US20200274488A1

公开(公告)日：2020-08-27

申请号：US16797276

申请日：2020-02-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Shinya AOKI ,  Ryuta NISHIZAWA

IPC: H03B5/04

Abstract: An oscillator includes a first container, a second container accommodated in the first container, a resonator element accommodated in the second container, a temperature sensor accommodated in the second container, a first circuit element that is accommodated in the second container and includes an oscillation circuit that causes the resonator element to oscillate so as to generate an oscillation signal on which temperature compensation is performed based on a detected temperature of the temperature sensor, and a second circuit element which is accommodated in the first container and includes a frequency control circuit that controls a frequency of the oscillation signal. The second container and the second circuit element are spaced from each other and are disposed to overlap each other in plan view.

公开(公告)号：US20190301865A1

公开(公告)日：2019-10-03

申请号：US16369080

申请日：2019-03-29

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01C19/5614 ,  G01C19/5628 ,  G01L1/10

Abstract: A physical quantity sensor includes: a supporting member; and a sensor element supported by the supporting member, in which the sensor element includes a vibrator element, a drive signal wiring disposed on the vibrator element, and a first detection signal terminal and a second detection signal terminal disposed on the vibrator element, the supporting member includes a substrate on which the sensor element is joined, and a first detection signal wiring and a second detection signal wiring disposed on the substrate, and the first detection signal wiring and the second detection signal wiring respectively include areas that extend along a second axis intersecting with the first axis and that intersect with the drive signal wiring in a plan view as seen in a direction in which the sensor element and the substrate overlap with each other.

公开(公告)号：US20190195630A1

公开(公告)日：2019-06-27

申请号：US16232112

申请日：2018-12-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Masashi SHIMURA ,  Atsushi MATSUO ,  Shinya AOKI ,  Shiro MURAKAMI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  H01L41/09 ,  G01C19/5607 ,  H01L41/047 ,  H03H9/15 ,  H03B5/32

CPC classification number: G01C19/5642 ,  G01C19/5607 ,  H01L41/047 ,  H01L41/09 ,  H03B5/32 ,  H03H9/15

Abstract: A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view.

公开(公告)号：US20190165759A1

公开(公告)日：2019-05-30

申请号：US16202870

申请日：2018-11-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuta NISHIZAWA ,  Shiro MURAKAMI ,  Shinya AOKI ,  Atsushi MATSUO ,  Masashi SHIMURA

IPC: H03H9/05 ,  H03H9/19 ,  H01L41/047 ,  H03B5/32 ,  G01C19/5621 ,  H01L23/00

Abstract: A vibration device including a vibrator, a circuit component, a relay substrate disposed between the vibrator and the circuit component, a package that accommodates the vibrator, the circuit component, and the relay substrate, a first metal bump that joins the circuit component to the package, a second metal bump that joins the relay substrate to the circuit component, and a third metal bump that joins the vibrator to the relay substrate.