公开(公告)号：US20240069057A1

公开(公告)日：2024-02-29

申请号：US18456801

申请日：2023-08-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01P3/44

CPC classification number: G01P3/44

Abstract: An angular velocity detection element includes: a drive vibration arm configured to perform flexural vibration according to an applied drive signal; and a detection vibration arm configured to perform flexural vibration according to an applied angular velocity. Each of the drive vibration arm and the detection vibration arm has a bottomed groove portion along an extending direction. d2/t2>d1/t1, in which t1 is a thickness of the drive vibration arm, d1 is a depth of the groove portion of the drive vibration arm, t2 is a thickness of the detection vibration arm, and d2 is a depth of the groove portion of the detection vibration arm.

公开(公告)号：US20220236057A1

公开(公告)日：2022-07-28

申请号：US17718418

申请日：2022-04-12

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  B60R16/023 ,  G01C19/5656 ,  G01P15/18 ,  G01C19/5607 ,  G01C19/56

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US20220178694A1

公开(公告)日：2022-06-09

申请号：US17679272

申请日：2022-02-24

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Seiichiro OGURA ,  Keiichi YAMAGUCHI

IPC: G01C19/5705

Abstract: Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0

公开(公告)号：US20210408365A1

公开(公告)日：2021-12-30

申请号：US17361478

申请日：2021-06-29

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA

IPC: H01L41/22 ,  H01L41/09

Abstract: A vibrator includes: a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion. The first main surface includes a first planar surface, a second planar surface which is located closer to the second main surface than is the first planar surface and which is parallel to the first planar surface, and an inclined surface which couples the first planar surface and the second planar surface and which forms an angle of 100° or less with the first planar surface. A method for manufacturing a vibrator includes: a preparation step of preparing the above-described vibrator; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film from a normal direction of the first planar surface.

公开(公告)号：US20160223328A1

公开(公告)日：2016-08-04

申请号：US15097869

申请日：2016-04-13

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Takayuki KIKUCHI ,  Ryuta NISHIZAWA ,  Seiji OSAWA

IPC: G01C19/5607 ,  G01C19/5628

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract translation: 振动元件包括从基部向相反方向延伸的一对第一和第二驱动振动臂; 所述第一重物与所述第一和第二驱动振动臂中的至少一个朝向所述基座部分的顶端间隔开并设置在所述至少一个所述驱动振动臂的第一区域中; 以及设置在作为所述第一配重的前端与所述至少一个所述驱动振动臂的前端之间的区域的第二区域中的第二配重。 当第一区域的区域表示为A1时，将第一重量的质量表示为B1，将第二区域的面积表示为A2，将第二重量的质量表示为B2，B1 / A1> B2 / A2建立。

公开(公告)号：US20230109944A1

公开(公告)日：2023-04-13

申请号：US18081084

申请日：2022-12-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/10 ,  G01C19/5621

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20210033395A1

公开(公告)日：2021-02-04

申请号：US16941655

申请日：2020-07-29

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  B60R16/023

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US20150222244A1

公开(公告)日：2015-08-06

申请号：US14687401

申请日：2015-04-15

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Takayuki KIKUCHI

IPC: H03H9/21 ,  H01L41/107 ,  H01L41/047

CPC classification number: H01L41/253 ,  G01C19/5607 ,  H01L41/0475 ,  H01L41/09 ,  H01L41/107 ,  H03H9/21 ,  Y10T29/42

Abstract: A vibration gyro device has a base part and a pair of drive vibrating arms and a pair of detection vibrating arms respectively extended from both ends in a Y-axis direction of the base part. Further, adjustment vibrating arms extended from respective ends of connecting parts respectively extended from both ends in an X-axis direction of the base part in parallel to the drive vibrating arms are provided. At the end sides of the respective adjustment vibrating arms, spindle parts as wider parts are provided. On principal surfaces of the respective adjustment vibrating arms, adjustment electrodes as membranes for adjustment of leakage output of the vibration gyro device are provided.

Abstract translation: 振动陀螺装置具有分别从基部的Y轴方向的两端延伸的基部和一对驱动振动臂和一对检测振动臂。 此外，设置了从驱动振动臂平行的基部的X轴方向的两端分别延伸的连接部的各端部延伸的调节振动臂。 在相应的调节振动臂的端侧设有主轴部件作为较宽的部件。 在各个调节振动臂的主表面上，设置有作为用于调节振动陀螺仪装置的泄漏输出的膜的调节电极。

公开(公告)号：US20150162522A1

公开(公告)日：2015-06-11

申请号：US14560402

申请日：2014-12-04

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA ,  Takayuki KIKUCHI

IPC: H01L41/053 ,  H01L41/09

CPC classification number: G01C19/5621 ,  G01C19/5607

Abstract: A vibration element includes a vibrating portion, a support portion that supports the vibrating portion, and a suspension arm that couples the vibrating portion to the support portion. In addition, the suspension arm includes a meandering portion extending out the support portion and an inclination portion that couples the meandering portion to the vibrating portion.

Abstract translation: 振动元件包括振动部分，支撑振动部分的支撑部分和将振动部分连接到支撑部分的悬架臂。 此外，悬架臂包括延伸出支撑部的曲折部分和将曲折部分耦合到振动部分的倾斜部分。

公开(公告)号：US20140020503A1

公开(公告)日：2014-01-23

申请号：US13947468

申请日：2013-07-22

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Takayuki KIKUCHI ,  Ryuta NISHIZAWA ,  Seiji OSAWA

IPC: G01C19/56

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract translation: 振动元件包括从基部向相反方向延伸的一对第一和第二驱动振动臂; 所述第一重物与所述第一和第二驱动振动臂中的至少一个朝向所述基座部分的顶端间隔开并设置在所述至少一个所述驱动振动臂的第一区域中; 以及设置在作为所述第一配重的前端与所述至少一个所述驱动振动臂的前端之间的区域的第二区域中的第二配重。 当第一区域的区域表示为A1时，将第一重量的质量表示为B1，将第二区域的面积表示为A2，将第二重量的质量表示为B2，B1 / A1> B2 / A2建立。