A variety of applications can include apparatus having a memory device with metal digit lines coupled to various digit line contacts for a memory array in an integrated process flow of the metal lines with metal contacts of transistors in a periphery to the memory array region, with a metal silicide formed on the gates of the transistors. The metal silicide for each transistor can be coupled to the metal contact for the transistor. In the integrated process flow, material of the metal digit lines can be used as the metal contact to the transistors in the periphery to the memory array region. The metal silicide can be formed by conversion of polysilicon formed on the memory array region and the periphery to the memory array region in the integrated process flow.