Invention Publication
- Patent Title: EUVL PRECISION COMPONENT WITH SPECIFIC THERMAL EXPANSION BEHAVIOR
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Application No.: US18468183Application Date: 2023-09-15
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Publication No.: US20240077798A1Publication Date: 2024-03-07
- Inventor: Florian Kanal , Ralf Jedamzik , Ina Mitra
- Applicant: Schott AG
- Applicant Address: DE Mainz
- Assignee: Schott AG
- Current Assignee: Schott AG
- Current Assignee Address: DE Mainz
- Priority: DE 2021106417.1 2021.03.16 DE 2021106419.8 2021.03.16 DE 2021134308.9 2021.12.22 WO TEP2022056660 2022.03.15
- Main IPC: G03F1/24
- IPC: G03F1/24
Abstract:
A precision extreme ultraviolet lithography (EUVL) component having an average coefficient of thermal expansion (CTE) in a range from 0 to 50° C. of at most 0±0.1×10−6/K, and a thermal hysteresis of
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